Sputter Coaters / Vacuum Coating Systems - High Vacuum, Single Magnetron Target Desk Sputter Coater DST1-170
High Vacuum, Single Magnetron Target Desk Sputter Coater DST1-170
The High Vacuum, Single Magnetron Target Desk Sputter Coater DST1-170 is configured as a Desk Sputter Coater, specifically designed for Scanning Electron Microscope (SEM) sample preparation. DST1-170 is versatile, capable of depositing a wide range of materials, including gold (Au), platinum/palladium (Pt/Pd) alloy, silver (Ag), chromium (Cr), tungsten (W), iridium (Ir), and more.
DST1-170 excels in producing high-quality, uniform films with fine grain sizes. These films are ideal for specimens that demand high-resolution and high-quality characterization, such as FE-SEM, EDS/WDS, TEM, and EBSD applications. Equipped with a 2-inch magnetron cathode and an 80-watt switching DC power supply, DST1-170 is suitable for various research and thin film applications.
Clean Vacuum of Desk Sputter Coater
The vacuum chamber is made of cylindrical Pyrex. The DST1-170 is equipped with an internally mounted 90 L/s turbomolecular pump, supported by a 4m³/h two-stage rotary vane pump. This configuration ensures a clean vacuum environment, free from the oil contamination typically associated with standard diffusion pumps.
Touch Screen Control
The DST1-170 features a 7-inch color touchscreen interface with full automatic control and user-friendly data input, making it accessible even for inexperienced users. Users can easily operate the system through the touchscreen, where vacuum levels, current, and deposition information can be viewed as digital data or displayed as curves. Additionally, the system can store information on the last 300 coatings, which can be accessed on the history page for reference.