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SPUTTER COATERS / VACUUM COATING SYSTEMS - Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300

Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300

Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300 is equipped with a large chamber, making it perfect for preparing samples for FE-SEM, EDS/WDS, TEM, EBSD analysis, and thin film applications. This coater operates under high vacuum conditions, ensuring the deposition of uniform carbon and metal films with fine grain sizes. These features make it ideal for specimens that demand high-resolution and high-quality characterization.

The Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300 features a cylindrical chamber with a diameter of 300 mm, enabling long-term deposition on samples up to 15 cm in diameter or multiple small specimens. Its fully automatic programmable carbon coating process ensures easy, precise, and repeatable performance.

Additionally, this coating machine offers the advantage of thermal evaporation of low melting point materials in two directions – upward or downward. The distance between the thermal source and the substrate is adjustable, further enhancing its versatility.

The Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300 facilitates the deposition of carbon films tailored for SEM, FE-SEM, EDX, and TEM sample preparation. It also supports the creation of conductive layers. Additionally, users have the option to perform TEM grid plasma treatment for enhanced hydrophilicity. Furthermore, the system enables TEM aperture cleaning utilizing the thermal source holder.

Hardware

  • High vacuum level achieved through a built-in turbo pump from Leybold, supported by a two-stage rotary vane backing pump available in diaphragm or scroll pump variants.
  • An optional internal 500 W switching DC power supply for carbon fiber deposition.
  • An external 1.2 kW high-current DC power supply suitable for metal evaporation and carbon rod deposition.
  • A quartz crystal thickness monitor boasting a precision of 1 nm and a resolution of 1 Å for accurate monitoring of deposition thickness.
  • An automatic venting valve for controlled release of vacuum pressure.
  • Adjustable sample rotation, height, and tilt, particularly designed for small sample holder stages.
  • An optional planetary sample holder for enhanced versatility.
  • Two high-current electric feed-throughs for easy insertion of thermal sources.
  • A movable thermal source holder enabling upward or downward deposition configurations.
  • S-Clip sample holders on the thermal head facilitating upward deposition.
  • An electronic shutter for precise control over deposition processes.
  • Easy-to-change specimen stages, with a rotation stage provided as standard.
  • A two-year warranty and compliance with CE conformity standards.
  • Coverage under both public and product liability insurance worldwide, ensuring protection against property damage or personal injury.
  • Automation

  • An intuitive touch screen interface for easy control of the coating process and rapid data input.
  • User-friendly software that can be updated via the network for continuous improvements and compatibility enhancements.
  • Optional semi-full automatic coating process for enhanced efficiency.
  • The capability for repeatable and programmable carbon coating processes in automatic mode, ensuring consistent results.
  • Optional pulsed or flash carbon fiber coating modes for specialized applications.
  • Optional pulsed or ramped carbon rod coating modes to meet specific requirements.
  • Automatic carbon fiber/rod/thermal deposition based on the set thickness value, streamlining the process.
  • Recording and plotting of coating parameters graphs for analysis and optimization.
  • Storage of coating recipes for easy access and repeatable depositions, promoting efficiency and consistency.
  • Pulsed Carbon Fiber Evaporation

    The Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300 system can carry out pulsed carbon fiber evaporation. Short pulses offer greater control over deposition, substantially minimizing the debris typically associated with conventional carbon deposition methods.

    Carbon Rod Evaporation (Optional)

    This benchtop coating system can be optionally equipped with a carbon rod head. In such instances, an external 0-100 A high current power supply is required instead of the internal high current power supply intended for carbon fiber evaporation.

    Thermal Evaporation

    Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300 is outfitted with a high-current power supply and a low-voltage (resistive) thermal evaporation platform, making it suitable for a diverse array of thermal evaporation applications. The system enables precise control over the thermal evaporation of a broad spectrum of materials onto the substrate. Additionally, various types of thermal evaporation sources, including boats, baskets, and coils, can be installed on the single thermal source holder for added versatility.

    Clean Vacuum

    The vacuum chamber of the Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300 is constructed from cylindrical Pyrex glass, with dimensions of 300 mm outer diameter and 200 mm height. It is equipped with an internally mounted turbo molecular pump, supplemented by an optional 6 m3/h two-stage rotary vane pump. This configuration ensures the introduction of clean vacuum conditions without the oil contamination typically associated with conventional diffusion pumps.

    Touch Screen Control

    Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300 features a 7-inch colored touch screen that enables full automatic control through user-friendly software, facilitating precise adjustment of the deposition process parameters. Users can monitor vacuum levels and coating sequences either as digital data or as curves directly on the touch screen interface. The system also stores information on the last 300 coatings, accessible through the history page, and allows for easy transfer to a PC via a USB port located on the device.

    Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300

    Sample Holder Stages

    The Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300 offers various customized sample stage configurations to meet diverse user needs. The standard sample rotation stages are rotatable and feature adjustable height and angle, ensuring ease of use and versatility. Additionally, users have the option to include a rotary planetary sample stage, which is ideal for achieving uniform coatings on porous specimens.

    For deposition on larger samples, an optional 6-inch rotatable sample holder stage is recommended. While this stage does not include incline adjustment, it provides ample space for accommodating sizable samples.

    Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300

    Standard Sample Holder

    Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300

    Planetary Sample Holder

    Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300

    6-inch Rotatable Sample Holder Stage

    The Turbo Pumped Carbon Coater and Thermal Evaporator offers an optional turbo molecular pump with various pumping speeds, enhancing its performance capabilities. Key specifications include:

  • Vacuum chamber dimensions of 300 mm outer diameter and 200 mm height.
  • Ultimate vacuum of less than 8 x 10-6 Torr.
  • Overall dimensions measuring 580 x 500 x 630 mm (height x width x depth).
  • Utilities requirement of 220/110 V, 50/60 Hz with a power rating of 2 kW.
  • Automatic control of pressure-independent coating processes.
  • Precise vacuum pressure adjustment facilitated by an automatic leak valve.
  • Real-time visualization of coating parameters through plotted data.
  • Easy transfer of coating data plots to a PC via a USB port.
  • Shipping weight of 46 kg.
  • Pumping Speed
    90 l/s
    250 l/s
    350 l/s
    Ultimate Pressure

    8×10-6

    3×10-6

    8×10-7

    Options and Accessories

    The Turbo Pumped Carbon Coater and Thermal Evaporator system includes the following components and accessories:

  • Head and power supply for carbon rod evaporation
  • Plasma rod and high-voltage power supply for plasma treatment
  • Quartz crystal sensor for precise monitoring
  • Planetary sample rotation mechanism for uniform coating
  • Spare cylindrical vacuum glass chamber for backup or replacement
  • Carbon fiber for deposition purposes
  • Sealing gaskets to ensure vacuum integrity
  • Source boats and baskets for material containment during deposition processes
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