SPUTTER COATERS / VACUUM COATING SYSTEMS - High Vacuum, Single Magnetron Target Desk Sputter Coater DST1-300
High Vacuum, Single Magnetron Target Desk Sputter Coater DST1-300
The High Vacuum, Single Magnetron Target Desk Sputter Coater DST1-300 is a versatile coating system capable of applying coatings on semiconductors, dielectrics, and both oxidizing and non-oxidizing metals. It excels in producing uniform thin films with fine-grain sizes in a short cycle time.
The spacious chamber of the DST1-300, available with 2, 3, or 4-inch magnetron and a water-cooled cathode, is well-suited for coating large specimens with diameters of up to 15 cm or multiple smaller specimens with similar diameters. Its unlimited sputtering time makes it ideal for depositing thick layers.
Equipped with a 600W DC power supply and an optional 300W RF power supply with an auto-matching box, this Single Target Coater offers flexibility. The high vacuum system enables the deposition of a wide range of materials on various surfaces, catering to thin film applications, including micro and nanoelectronics and SEM sample preparation.
The Magnetron Sputter Coater model DST1-300 is a versatile coating system capable of applying coatings to semiconductors, dielectrics, and both oxidizing and non-oxidizing metals. It excels at producing uniform thin films with fine-grain sizes quickly.
The spacious DST1-300 chamber, available with 2, 3, or 4-inch magnetron options and a water-cooled cathode, is ideally suited for coating large specimens with diameters of up to 15 cm or multiple smaller specimens of similar size.
With unlimited sputtering time, it's well-suited for depositing thick layers. The Single Target Coater comes equipped with a 600W DC power supply and offers an optional 300W RF power supply with an auto-matching box for added flexibility.
The high vacuum system can deposit a wide range of materials onto different surfaces, making it suitable for thin film applications such as micro and nanoelectronics, as well as SEM sample preparation.
Desk Carbon Coater DCR is a compact carbon fiber coating system suitable for sample preparation for the use in scanning electron microscope (SEM), Transmission electron microscope (TEM) and X-Ray analysis (EDX).
This device is available in two formats:
Pumping Speed | 90 l/s | 350 l/s |
Ultimate Pressure | 7 x10-6 Torr | 7×10-7 Torr |
Touch screen control with colorful display
The DST1-300 features a user-friendly 7-inch color touchscreen interface with full automatic control and data input capabilities, making it accessible even for inexperienced users. Through this touchscreen, users can easily operate the system and view vacuum levels, current values, and deposition information either as digital data or in graphical curve forms. Additionally, the system has the capacity to store information related to the last 300 coatings, which can be conveniently accessed in the history page for reference.
Clean Vacuum
The vacuum chamber is constructed from cylindrical Pyrex and has dimensions of 300 mm in outer diameter (OD) and 200 mm in height (H). The DST1-300 is equipped with an internally mounted 90 l/s turbomolecular pump, which is supported by a two-stage rotary pump. This configuration ensures a clean vacuum environment, free from the oil contamination commonly associated with ordinary diffusion pumps.
This system is suitable for various applications, including:
- Deposition of metal, semiconductor, and dielectric films
- Nano and microelectronic applications
- Solar cell manufacturing
- Coating of optical components
- Development of thin film sensors
- Production of magnetic thin film devices
- Applications in computer memory
- Achieving fine-grain structural deposition for SEM and FE-SEM sample preparation
It offers versatility across a range of industries and research areas.
Options and Accessories
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