RF Plasma Generator 300W-600W
RF Plasma Generator 300W-600W designed for sputtering and plasma applications are trusted tools for industrial and laboratory processes, such as deposition, plasma generation, and dielectric heating and melting. These devices play a critical role in semiconductor manufacturing systems, where they aid in the production of integrated circuits (ICs) and chips used in modern computers and electronic devices. Combined with an impedance matching network, the RF generator forms a complete RF plasma generation system.
Built to meet specific requirements, the RF generator is available in frequency bands such as 27.12 MHz, 13.56 MHz, 2 MHz, and other options tailored to customer needs.
Why 13.56 MHz?
This frequency is one of the most widely utilized in the industrial, scientific, and medical (ISM) radio bands. Reserved for general use, this band enables high-power activities without disrupting nearby telecommunications systems. Generators in this band span a power range from a few milliwatts to several hundred kilowatts, accommodating various application demands.
Radiofrequency (RF) generators
Designing these RF generators requires a blend of radiofrequency electronics, advanced power amplifier protection, closed-loop control, and high safety margins. Notable qualities include straightforward manufacturing and repair, combined with exceptional efficiency.
These generators are designed for continuous operation, with user-friendly controls and safeguards against electromagnetic interference. Additional features include error type display, transmitted and reflected power readouts, an optional 0-5 V input for output power control, optional analog outputs for power values, reflected power limitation, and a compressed air cooling system.
Models are available in a range from 100 W to 15 kW using semiconductor components and up to 100 kW with vacuum tube-based amplifiers. The RF150W and RF300W models are engineered to work seamlessly with the matching network, ensuring optimal performance for varied applications.
These RF generators come equipped with a reflected power limiter and an air-cooling system, achieving a DC-to-RF conversion efficiency of over 70%. The graphical touch-screen interface allows easy control, display, and adjustment of settings, while multiple protection features safeguard against reflected power, overheating, overcurrent, and overvoltage, with automatic power limiting.
For remote control, a 0-5 V input adjusts output power, and models over 300 W reach efficiencies exceeding 90%. Analog outputs provide real-time transmitted and reflected power values, and closed-loop control ensures stable power over time. Shielding against radiation and EMI noise is also in place to protect both performance and operator safety. This unit is designed for convenient rack installation, making it versatile for various industrial setups.
| Power supply | 220 V (200-240 V), 50 Hz (50-60 Hz)(110V is also available) |
| Output frequency | 13.56 MHz |
| Protection | Various types (protection against reflected power, overtemperature, overcurrent, and overvoltage), especially reflected power limiter |
| Display | Graphic display with touch screen or digital display |
| Remote control | Digital RS485 |
| Working temperature | 10-40°C |
| Cooling | Air conditioned |
| Output impedance | 50Ω(resistive) |
| Dimensions (cm) | Depends on device output |
| Weight | Depends on device output |
| Output connector | N – 7/16 |
| Box material | aluminium |
RF generation Models
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